Dear Group:

        I wanna know how to deposite and pattern the PZT thin film (10~20um) on
the silicon or electrode metal.

        I found some information about deposition of piezo material from
database of discussion groups.

        Someone say the PZT film obtained from deposition is much worse property
than bulk PZT.

        I wanna know the different properties among PZT films obtained from
different fabrication methods and what is solid freeform fabrication, fusued
deposition of ceramics.

        I cannot find the proceedings of SFF which has several papers I want for
exaple, "Fused Deposition of Ceriamics and Metals : An overview".

        Thanks for your kindness.

Sincerely,