Hi everyone,

I am working in reactive sputtering in a UHV system and my heater is
damaged. The problem is that the connectors into ceramic heating plate
are full of oxide. I can not use any acides as the graphite foil will
disolve. Does anyone has any ideea how I should proceed? A new heater
plaque (PBN) able to work at 1300 C is around 5000 Euros and also
takes a lot of time. The ceramic heater looks good only the connectors
are looking dirty.

Thank you
Petru