Geoff, I havent used the gas but I  found this on the net,  at the end u
could find the compatibility w/ other materials.

cheers,

Rene

http://encyclopedia.airliquide.com/encyclopedia.asp?languageid=11&GasID=66&Count
ryID=19

On 1 December 2011 13:10,  wrote:

> Hello all,
>
> We are using a pure CHF3 process to etch oxide for our process and our
> roughing pumps are being damaged as a result. Small white flakes can be
> found in the filter, which is also dyed red (from an initial beige colour).
> Does anyone have any experience with this problem, and are there any
> methods to over come it?
>
> Regards,
>
> -Geoff