Hi Marcos, Thanks for your prompt reply. I have to change the typo in my last few sentences. My question is if the problem is caused by a too thin gold layer or the lacking of adhesion layer? I will try to add an adhesion layer to see how it changes the yield. Thanks >________________________________ > From: "Ruiz, Marcos Daniel (SGNCOE)">To: Shane GUO ; General MEMS discussion >Sent: Monday, December 5, 2011 7:19:40 PM >Subject: RE: [mems-talk] e-beam evaporation of gold > >The missing adhesion layer is your most likely culprit.