Hi everyone, In MEMS Design, someone maybe want to design a device, just like the micro-switch, that has 2MHz frequency. What does it mean?(resonant frequency or others)... If we want to use some simulation tools such as IntelliCAD, ANSYS or Sugar to predict the micro-device performances, what should we need to do? ( mode analysis ..or others) Thank you very much! sincerely, -------------- Yu-Chen Lin National Chiao-Tung University, HsinChu, Taiwan