durusmail: mems-talk: defects in Phosphorus doped poly-si
defects in Phosphorus doped poly-si
2011-12-21
defects in Phosphorus doped poly-si
Regga Tekeste
2011-12-21
Does anyone has any experience with surface defects on thick phosphorus doped
polysilicon?  The defects are large and look like bumps (rounded) on the
surface from the SEM.

Thanks,
regga

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