To the MEMS community: Recently we conducted a survey about MEMS layout
software. The question was: which is the best mask layout software for MEMS
designers, L-EDIT, Autocad, Magic or other? We had roughly 30 repsonses to this
survey, the results are as follows: Cadence 37.5% Ledit 25.0% Vem 12.5% ISS
6.25% Autocad 6.25% Magic 6.25% KIC 6.25% The sample size is probably too small
to put too much faith in the exact numbers on this chart, but the general trend
is to favor Cadence and Ledit. A summary of some of the comments that were sent
to us is given below. Cadence +Very simple +Extensive geometrical shapes
(donuts, all angle rotation) +Various output formats, CIF, GDS +Fracture data,
DRC -Expensive LEDIT +User friendly +Very simple +Relatively inexpensive -No
all-angle rotation -No DRC (?) -Only manhattan geometries (? in our experience,
non-manhattan is possible)> VEM +Relatively inexpensive +Can handle curves ISS
+Similar to Cadence Autocad +Any shape is doable -Formats are hard to deal with
Magic -Only manhattan geometries KIC +Allows non-manhattan geometries -Not very
elegant or easy to use Thanks to all who have responded. Any further comments
are welcome. Tim Betzner (tbetzner@uceng.uc.edutbetzner@uceng.uc.edu) Nancy
Golubovic (ngolubov@uceng.uc.edu)