durusmail: mems-talk: Chromium as a mask for wet etching of aluminum
Chromium as a mask for wet etching of aluminum
2012-01-03
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2012-01-05
Chromium as a mask for wet etching of aluminum
Ned Flanders
2012-01-05
Hi,

features are tens of um, up to 200 um for the largest covered features
and 100 for the largest open areas.

On 1/4/12, Kevin Nichols  wrote:
> What are your feature sizes (beyond 100 micron depth)?
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