durusmail: mems-talk: RE: Chamber
RE: Chamber
1999-06-07
RE: Chamber
Dunham, Glen
1999-06-07
No you cannot.  However, if you have Zygo's michaelson interferometer objective
you can solve this by pulling out the shutter in the reference optical path and
replacing it with an identical window.  This enables measuring through the
window of your cell.

Glen Dunham
Pacific Northwest National Laboratory

        ----------
        From:   ZHANG YANHANG
        Reply To:       ZHANG YANHANG;mems-cc@ISI.EDU
        Sent:   Tuesday, June 1, 1999 8:52 AM
        To:     MEMS@ISI.EDU
        Subject:        Chamber


        Morning everybody!

        I am a graduate student at CU-Boulder. I use interferometric microscope
        (Zygo, NewView 200) to characterize the surface deformation of MEMS
        structures. Zygo produces a picture of the surface profile of MEMS
        structures. Now I want to heat up the specimen. I am trying to build up
a
        chamber, because I want to have a precise controll of the temperature of
        the specimen and also I don't want to destroy the optics of the
        microscope. This bears the question: can I still obtain a picture
through
        the window of the chamber?

        Is there anybody who has ever done such kind of reserch or knows where
        I can buy a chamber used for the microscope or has any suggestions on
        building up a chamber? I would appreciate any suggestions or comments.

        Thanks a lot!

        Yanhang


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