Hello,

Can anybody suggest a method to etch SiO2 without etching a buffer layer of
Al2O3?

Thank you.
Best Regards.

--
Domenico Tulli
Nano Photonics-Optoelectronics Group

ICFO-The Institute of Photonic Sciences
Mediterranean Technology Park
Av. Carl Friedrich Gauss, num. 3
08860 Castelldefels (Barcelona), Spain

Tel: +34 93 553 4128
Fax: +34 93 553 4000
E-mail: domenico.tulli@icfo.es
WEB: www.icfo.es