Domenico, Please explain how thiol is used in wafer bonding (references?). Roger Shile -----Original Message----- From: mems-talk-bounces+rshile=nanoink.net@memsnet.org [mailto:mems-talk-bounces+rshile=nanoink.net@memsnet.org] On Behalf Of domenico.tulli@icfo.es Sent: Monday, January 16, 2012 3:20 PM To: General MEMS discussion Subject: Re: [mems-talk] Au-Au thermo-compression wafer bonding Why don't you try a thiol? It should work at low temperature without using much weight. Regards.