Hello to everyone,

I have a question about ultra-smooth ITO glass. Which
company could provide ultra-smooth ITO glass, the
surface roughness should be less than 1nm, thickness is about 0.5mm.
This ITO glass will be used as a substrate in e-beam lithography.

Polished glass and very smooth silicon
are very common, and a lot of company could provide. But most companies could
only provide ITO glass with very rough surface (the roughness is usually 5nm,
cannot
be used in e-beam lithography). If you know the company which could provide very
smooth ITO glass, please let me know. Thank you very much.

Best regards,

xingzhan