durusmail: mems-talk: Intermediate layer of tantalum
Intermediate layer of tantalum
2012-03-09
2012-03-12
2012-03-23
2012-03-23
2012-03-23
Intermediate layer of tantalum
Kevin Nichols
2012-03-23
I've found the Goldschmidt classification scheme from geochemistry to
be a decent first-pass rule of thumb for thin film deposition on SiO2.
This is basically a classification of how well metals will combine
with oxygen. If it's classed as a "lithophile," odds are it will stick
well. If not, use an adhesion layer.

Wikipedia has the periodic table colored by Goldschmidt classification here:
http://en.wikipedia.org/wiki/Goldschmidt_classification

On Fri, Mar 9, 2012 at 9:12 AM, Lina Gonzalez  wrote:
> Hi all,
>
> What is the special interaction between sputtered tantalum on glass that
> makes tantalum stick to glass? For example, why would you want a Ta layer
> before depositing NiFe when having a glass substrate?
>
> Thanks,
>
> Lina
>
>
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