durusmail: mems-talk: Adhesion problems on aluminum alloy substrate
Adhesion problems on aluminum alloy substrate
2012-04-11
2012-04-12
2012-04-12
2012-04-18
Adhesion problems on aluminum alloy substrate
Michael Martin
2012-04-12
You've probably already tried this but in case you haven't: O2 plasma clean
with lots of power to get a little sputtering too and of course pre-sputter
the substrate in the deposition system.

On Wed, Apr 11, 2012 at 4:57 AM, Ned Flanders  wrote:

> Hello all,
>
>
> I am trying to sputter chromium on an aluminum alloy (6061 or 7075 or
> some such) plate. The adhesion is random and poor, no matter what I do
> to clean the surface. I am now thinking of sputtering aluminum and
> then chromium on top of that, and then anneal at 400C.
>
> Any other ideas?
>
>
>
> m
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