durusmail: mems-talk: Flash Dry for Stiction reduction
Flash Dry for Stiction reduction
Flash Dry for Stiction reduction
Rob MacDonald (rmacdonald)
2012-04-19
I recently found this interesting paper on Flash Release.

I'm wondering if anyone on this list has tried this themselves, and what results
they have had.

Thanks,

Rob


Flash release-an alternative for
releasing complex MEMS devices
S Deladi, V Svetovoy, G J M Krijnen and M C Elwenspoek

http://eprints.eemcs.utwente.nl/9936/01/flash_release_-_deladi.pdf
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