durusmail: mems-talk: AlGaAs vs. GaAs wet etch
AlGaAs vs. GaAs wet etch
2012-04-25
2012-05-30
AlGaAs vs. GaAs wet etch
Xing Sheng
2012-04-25
Hi all,

I am looking for a wet etching recipe to selectively etch away 50nm
Al_0.3Ga_0.7As layer on top of 200nm GaAs. I appreciate any useful suggestions.

Thanks!

------------------
Best regards,

Xing Sheng

2012-04-24
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