durusmail: mems-talk: the deposition speed of the passive layer during DRIE process
the deposition speed of the passive layer during DRIE process
2012-05-07
the deposition speed of the passive layer during DRIE process
Xin Yan
2012-05-07
Hi everyone,

i want to use the -[CH2]-n  polymer  deposited during DRIE process to be
the protective layer,

Could somebody have such experience to deposited the  -[CH2]-n  polymer by
DRIE machine? what's the deposition speed?

Any suggestion will be appreciated!


Best Regards,

--
Yan Xin
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