durusmail: mems-talk: Removal of crosslinked SU8
Removal of crosslinked SU8
2012-07-17
Yingtao Tian
2012-07-17
Karim Ogando
2012-07-17
Yingtao Tian
2012-07-17
Mike Whitson
2012-07-17
Shay
2012-07-17
Ad Hall
2012-07-17
Lukasz Urbanski
2012-07-20
Matthieu Nannini, Dr.
Removal of crosslinked SU8
Yingtao Tian
2012-07-17
Hi Karim,

The SU8 is very thick, about more than 500 um. It happened when I was doing the
exposure. The wafer stuck with the mask after exposure. I put them in EC solvent
overnight but the exposed area is now crosslinked and like a strong glue between
wafer and mask.

Thanks,
Yingtao

-----Original Message-----
From: mems-talk-bounces+y.tian=bham.ac.uk@memsnet.org [mailto:mems-talk-
bounces+y.tian=bham.ac.uk@memsnet.org] On Behalf Of Karim Ogando
Sent: 17 July 2012 15:44
To: General MEMS discussion
Subject: Re: [mems-talk] Removal of crosslinked SU8

Hi Yingtao,

Maybe you can use O2 Plasma, but it is going to damage the thin oxide film on
the top of the chrome.

which is the thickness of the crosslinked SU8?

Best regards,

Karim

On Tue, Jul 17, 2012 at 11:16 AM, Yingtao Tian  wrote:
> Hi All,
>
> I have a chrome/glass mask seriously contaminated by crosslinked SU8, anyone
has an idea how to rescue the mask?
>
> Thanks,
> Yingtao
>
>
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_______________________________________________
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Visit us at http://www.mems-exchange.org

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