durusmail: mems-talk: Slope feature!!
Slope feature!!
2012-07-18
2012-07-19
2012-07-18
Slope feature!!
Bill Moffat
2012-07-18
Alaeddin, +/- 22 degrees around the vertical is easy.  This is used typically
with image reversal for metal lift off profiles.  It sounds like you are asking
for +/- 89 degrees around the vertical.  Best of luck.  Bill Moffat

-----Original Message-----
From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-
talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of alaa melhem
Sent: Tuesday, July 17, 2012 12:03 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Slope feature!!

Hi There,

Is it possible to apply gray scale lithography on metal material like copper? I
would appreciate if anyone tried that and would I get a thicknessĀ slopeĀ ending
with some nanometers?

Looking forward to get feedback.

Thank you,
Alaeddin
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