Beware of O2 plasma, it will etch the chrome on your mask.
I would try 350°C (or more) bake for as long as you can. It might burn the SU8
away.

Matthieu

-----Original Message-----
From: mems-talk-bounces+y.tian=bham.ac.uk@memsnet.org [mailto:mems-talk-
bounces+y.tian=bham.ac.uk@memsnet.org] On Behalf Of Karim Ogando
Sent: 17 July 2012 15:44
To: General MEMS discussion
Subject: Re: [mems-talk] Removal of crosslinked SU8

Hi Yingtao,

Maybe you can use O2 Plasma, but it is going to damage the thin oxide film on
the top of the chrome.

which is the thickness of the crosslinked SU8?

Best regards,

Karim

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