I have seen bad charging effects with Gold/Silicon Nitride/Gold. You may
wish to use a different metal such as aluminum. I believe Gold can diffuse
into the dielectrics at near breakdown voltages.

---T

On Mon, Aug 20, 2012 at 4:32 PM, yi fei  wrote:

> Hi All
>   I am trying to deposit a 1um silicon dioxide layer on gold to be the
> dielectric insulator layer between the bottom gold electrode and the top
> gold electrode.
>
>   I tried the ebeam evaporation of silicon dioxide due to limited access to
> other facilities like PECVD or sputterer.
>
>   It turns out there are pin holes in the evaporated layer and the top gold
> electrode get short connected to the bottom gold electrode.
>
>   Any one has any experiences of doing the similar structures: gold /
> dielectric  /gold ?
>
>   I appreciate if anyone can provide useful information
>
>   Thanks so much
>
>                   Fei
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> --
> Toby Xu
> Graduate Research Assistant
> PI: Dr. Degertekin
> Georgia Institute of Technology, Atlanta, GA
> Woodruff School of Mechanical Engineering (PhD.)
> (925) 963 1872
>
>  


 
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