The equipment is oxford plasma lab 80+. Patterns are ~50um wide trenches, gold patterns on glass substrate. Thanks! On Mon, Nov 19, 2012 at 11:34 AM, Ruiz, Marcos Daniel (SGNCOE) < Dan.Ruiz@honeywell.com> wrote: > Please provide more information about what you have to work with and what > you're trying to accomplish. > > 1 - What equipment are you working with? > > 2 - What does your topography look like (open steps, trenches, contact > holes)? > > 3 - What is the composition of the parts you need to process? > > Depending on what kind of coverage you need and what equipment you have > available, PECVD may or may not be the best answer for you. > > Dan > > -----Original Message----- > From: mems-talk-bounces+dan.ruiz=honeywell.com@memsnet.org [mailto: > mems-talk-bounces+dan.ruiz=honeywell.com@memsnet.org] On Behalf Of Sheng > Zhang > Sent: Monday, November 19, 2012 8:38 AM > To: mems-talk@memsnet.org > Subject: [mems-talk] PECVD silicon nitride step coverage for 5um step > > Hi, > > Does anyone has experience of PECVD silicon nitride on 5um steps? I'd love > to have some suggestions or recipe to start with. > > Thanks! > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk