Gabriel and Mike,  Twenty years ago Cypress published a paper on 0.5 micron
pillars that were about 1.5 microns high.  I have copies of this paper which I
can send to any interested parties.  It used off the shelf standard positive
resist and image reversal.  The beauty of image reversal is the angle of the
side wall can be controlled from =22 to -22 degrees around vertical.  For this
paper they chose vertical side walls.  I can also offer free tests of image
reversal to check your own data.  The techniques surrounding image reversal have
been refined since then.  I have seen 800 Angstroms lines and spaces using
interferometer generated grid patterns.  Bill Moffat

_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk