Dear Fahad. Pure HF is very agressive to glass. You should use a buffered
oxide etchant based in ammonium fluoride. There are plenty of recipes out
there. Give it a try...

Best regards

Nadim
El 04/12/2012 20:48, "Fahd Ali"  escribió:

>
> Hi,
>
> I have problem regarding glass etching. I made micro-channels using HF-40%
> on glass wafers. The problem is I have very sharp edges, which is not
> surprising. But for my application I need smooth edges.
>
> Is there any way during etching or after ?
> your answers are highly appreciated.
>
> regards,
> Fahad
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