Hi Nadim,
I used HF to achieve high depth of the channels 200µm. does buffered oxide
etchant can also give same result ?

regards,Fahad




> Date: Tue, 4 Dec 2012 18:16:34 -0300
> From: nadimest@gmail.com
> To: mems-talk@memsnet.org
> Subject: Re: [mems-talk] etched glass
>
> Dear Fahad. Pure HF is very agressive to glass. You should use a buffered
> oxide etchant based in ammonium fluoride. There are plenty of recipes out
> there. Give it a try...
>
> Best regards
>
> Nadim
> El 04/12/2012 20:48, "Fahd Ali"  escribió:
>
> >
> > Hi,
> >
> > I have problem regarding glass etching. I made micro-channels using HF-40%
> > on glass wafers. The problem is I have very sharp edges, which is not
> > surprising. But for my application I need smooth edges.
> >
> > Is there any way during etching or after ?
> > your answers are highly appreciated.
> >
> > regards,
> > Fahad
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