BHF, say 7:1, etches much slower than HF 40% on glass(cannot remember how much slower, 10x time?) a short blanket (remove all your masking layers) should round the corners without widening and deepening you channels too much. Just give it a try. Tinka Prime Wafers Rotterdam, NL -----Original Message----- From: mems-talk-bounces+t.li=primewafers.com@memsnet.org [mailto:mems-talk-bounces+t.li=primewafers.com@memsnet.org] On Behalf Of Fahd Ali Sent: Wednesday, December 05, 2012 4:46 PM To: mems-talk@memsnet.org Subject: Re: [mems-talk] etched glass Dear Li, Yes! i mean round corners. I haven't tried with BHF. with HF i achieved 200µm depth channels, will it make sense if I do BHF after HF etching ? regards,Fahd > From: t.li@primewafers.com > To: mems-talk@memsnet.org > Date: Tue, 4 Dec 2012 23:41:26 +0100 > Subject: Re: [mems-talk] etched glass > > I mean, after your etch, just to round the corners. > > Prime Wafers > > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk