durusmail: mems-talk: etched glass
etched glass
2012-12-04
Fahd Ali
2012-12-04
Nadim Morhell
2012-12-05
Fahd Ali
2012-12-06
Gareth Jenkins
2012-12-06
Kuijpers, Peter
2012-12-06
Gareth Jenkins
2012-12-04
Tinka Li
2012-12-05
Tinka Li
2012-12-05
Fahd Ali
2012-12-05
Tinka Li
etched glass
Gareth Jenkins
2012-12-06
You will get better results with less aggressive and buffered solutions but
you will need patience!
I have etched soda-lime to 250um over 24-48 hours. Borosilicate will be
much slower still.

On 5 December 2012 23:41, Fahd Ali  wrote:

>
>
> Hi Nadim,
> I used HF to achieve high depth of the channels 200µm. does buffered oxide
> etchant can also give same result ?
>
> regards,Fahad
>
>
>
>
> > Date: Tue, 4 Dec 2012 18:16:34 -0300
> > From: nadimest@gmail.com
> > To: mems-talk@memsnet.org
> > Subject: Re: [mems-talk] etched glass
> >
> > Dear Fahad. Pure HF is very agressive to glass. You should use a buffered
> > oxide etchant based in ammonium fluoride. There are plenty of recipes out
> > there. Give it a try...
> >
> > Best regards
> >
> > Nadim
> > El 04/12/2012 20:48, "Fahd Ali"  escribió:
> >
> > >
> > > Hi,
> > >
> > > I have problem regarding glass etching. I made micro-channels using
> HF-40%
> > > on glass wafers. The problem is I have very sharp edges, which is not
> > > surprising. But for my application I need smooth edges.
> > >
> > > Is there any way during etching or after ?
> > > your answers are highly appreciated.
> > >
> > > regards,
> > > Fahad
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> Visit us at http://www.mems-exchange.org
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