Goodmorning,

I was wondering what kind of mask was used to etch the glass in HF?
Is het Cr or Cr/Au?

best regards,

Peter Kuijpers
Senior Process Integrator
Philips Innovation Services
MiPlaza/TL group
High Tech Campus 04-p4.20
5656 AE Eindhoven
The Netherlands
Phone: +31 402798904
Mobile:+31 612507027,
Email: p.e.m.kuijpers@philips.com

www.innovationservices.philips.com


-----Original Message-----
From: mems-talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org [mailto:mems-
talk-bounces+p.e.m.kuijpers=philips.com@memsnet.org] On Behalf Of Fahd Ali
Sent: Wednesday 5 December 2012 16:41
To: mems-talk@memsnet.org
Subject: Re: [mems-talk] etched glass



Hi Nadim,
I used HF to achieve high depth of the channels 200µm. does buffered oxide
etchant can also give same result ?

regards,Fahad




> Date: Tue, 4 Dec 2012 18:16:34 -0300
> From: nadimest@gmail.com
> To: mems-talk@memsnet.org
> Subject: Re: [mems-talk] etched glass
>
> Dear Fahad. Pure HF is very agressive to glass. You should use a
> buffered oxide etchant based in ammonium fluoride. There are plenty of
> recipes out there. Give it a try...
>
> Best regards
>
> Nadim
> El 04/12/2012 20:48, "Fahd Ali"  escribió:
>
> >
> > Hi,
> >
> > I have problem regarding glass etching. I made micro-channels using
> > HF-40% on glass wafers. The problem is I have very sharp edges,
> > which is not surprising. But for my application I need smooth edges.
> >
> > Is there any way during etching or after ?
> > your answers are highly appreciated.
> >
> > regards,
> > Fahad
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