durusmail: mems-talk: RE: L-edit as a MEMS design tool
RE: L-edit as a MEMS design tool
RE: L-edit as a MEMS design tool
Ying.Xu@tanner.com
1999-05-25
Hi, mems designers,

It is true that the library elements in MEMS Pro don't have much practical
value for MEMS designers, but it is good for educational purpose.

Besides this, MEMS Pro provides a lot features to enhance the practical
designs,

1. Besides the well known features of L-edit for IC design, MEMS Pro L-edit
has improved drawing functions of arbitrary curved features, which is very
helpful to mems 'arbitrary' geometry drawing requirement.
2. MEMS Pro 3D Tool can generate 3D structure automatically from 2D layout
based on your customized process steps. It has and cross section view on 3D
structure at any 'cut' you want.
3. Besides the commercial foundry technology setups (ADIMEMS, Sandia ITT,
MCNC MUMPs, MOSIS), it is very easy to set up your own layers and
fabrication process and design rules.
4. For modeling purpose:
(1) you can do FEA by interfacing with ANSYS (export the 3D structure to ANF
format-ANSYS Native Format). You can further extract model parameters to
build macro models for your device for system level simulation at much
faster speed.
(2) You can write C, C++ program to do the modeling of your device then use
MEMS Pro T-Spice engine to do simulation
(3) You can generate a table from experiments, and T-Spice can take in the
data to do simulation.

Just listed some. You are welcome to do evaluation of the tool by contacting
(626)-792-3000 or visit our website http://www.tanner.com/eda

Ying Xu
MEMS Applications Engineer
Tanner Research Inc.
2650 E. Foothill Blvd.
Pasadena, CA 91107
phone: (626)-792-3000
fax: (626)-432-5705

-----Original Message-----
From: Yahong Yao [mailto:hhelen@hotmail.com]
Sent: Saturday, May 22, 1999 9:50 PM
To: MEMS@ISI.EDU
Subject: L-edit as a MEMS design tool


Hello everyone,

I am going to use L-edit to design mask layout for MEMS. It seems very
convenient to be used in IC layout because there are many standard devices
regarding to microelectronics for instance, CMOS, FET, NPN and so on.
What's the advantage to use it in MEMS? I think we can't use the standard
cells because they are meaningless to MEMS, is that right?

Any comments are greatly appreciated!

Yahong
------------------------
Yahong Yao
705K University Village
Columbia, MO 65203
Tel: (573)771-0382
Email:hhelen@hotmail.com


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