durusmail: mems-talk: Adhesive to bond onto a carrier wafer for etching
Adhesive to bond onto a carrier wafer for etching
2012-12-05
Shree Narayanan
2012-12-05
Tinka Li
2012-12-06
Michael Martin
2012-12-12
Shree Narayanan
2012-12-12
Michael Martin
2012-12-06
Felix Lu
2012-12-12
Shree Narayanan
2012-12-12
Bill Moffat
2012-12-12
Felix Lu
2012-12-06
Morrison, Richard H., Jr.
2012-12-12
Shree Narayanan
2012-12-12
MCNIE Mark
2012-12-07
basar bolukbas
2012-12-07
Shree Narayanan
2012-12-10
basar bolukbas
2012-12-12
Shree Narayanan
2012-12-07
Brian Stahl
2012-12-12
Shree Narayanan
2012-12-12
Brian Stahl
2012-12-11
Fei Wang
2012-12-12
Shree Narayanan
2012-12-12
Wangfei
2012-12-12
sangeeth kallatt
2012-12-07
Tang Tian
2012-12-12
Dave Roberts
2012-12-13
Xiaoguang Liu
Adhesive to bond onto a carrier wafer for etching
Shree Narayanan
2012-12-12
Dear Mr. Strahl,

Could you please tell me if this has been used to etch down to 200-300u? I
attempted thermal grease and it didnt help much. Especially with local
heating effects I lost most devices with photoresist getting etched away
quickly, in those locations.

Shree


On Fri, Dec 7, 2012 at 1:43 PM, Brian Stahl  wrote:

> In the nanofab at UCSB we use Santovac 5 diffusion pump oil to attach
> pieces to carrier wafers. I've personally used it for ICP-RIE (but it is
> also in the SOP for our Bosch process etcher) and it works well and is easy
> to clean up. Only the tiniest amount is required.
>
> Best regards,
>
> Brian Stahl
>
> --
> Sent from a mobile device.
> On Dec 5, 2012 11:13 AM, "Shree Narayanan"  wrote:
>
> > Hello all,
> >
> > I need to mount a 4" silicon wafer on a 6" metallized carrier wafer, in
> > order to etch it in a Alcatel deep-reactive ion etcher. I am wondering if
> > someone has used thermal vacuum grease for this purpose that can be
> removed
> > easily at the end. The silicon wafer is patterned with photoresist and
> has
> > no other material on it.
> >
> > Thanks
> > Shree
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> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
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_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
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Visit us at http://www.mems-exchange.org

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