Re: [mems-talk] Adhesive to bond onto a carrier wafer for etching

Hi Shree,
I think an electoplated metal mask will work. Yes - I know it's another
process step.
Dave

David Roberts (principal)
Silicon Valley Wafer Plating
807 Aldo Ave. Ste. 107
Santa Clara, CA 95054
(408) 469-3203
www.waferplating.com

> Thanks for the information:). I didnt try thermal release tape that you
> mentioned but I did try thermal grease itself. I had local heating effects
> which seemed to etch the photoresist away quickly. The problem I believe
> is
> that I am trying to etch down to more than 200u. I might be using
> metal/oxide mask to get around this entire issue.
>
> Shree
>
>
> On Sat, Dec 8, 2012 at 3:23 AM, basar bolukbas
> wrote:
>
>>
>> Dear Shree
>> We purchased this thermal bands from Japaniese SAMCO Company.They also
>> buy
>> from another company but never talk about its name. :)I think this is
>> something industry secret. :)I also couldn't found on the google.SAMCO
>> has
>> got good etching system and we use this band during its porcesses.I am
>> sure
>> that when you contact with SAMCO, they will also sell to you.If you buy
>> non-performed bands, it will be very cheap.Appx. 1 piece of A4 is like
>> 100$
>> etc...It is pink...And that is all i know.. :)
>> Regards.
>> PS: By the way i just check Nitto-Denko's page.It seems that they have
>> got
>> a lot of different bands for Semi Conductor Industry.I am sure that our
>> band is very similiar with Nitto's bands. It can be Nitto's band also.
>> :)
>> ---
>>
>> > From: snsnair@vt.edu
>> > Date: Fri, 7 Dec 2012 10:50:28 -0500
>> > To: mems-talk@memsnet.org
>> > Subject: Re: [mems-talk] Adhesive to bond onto a carrier wafer for
>> etching
>> >
>> > Dear Mr. Bolukbas,
>> >
>> > Appreciate your response. Can you point me to a thermal band that you
>> have
>> > used. I googled up the term and couldnt come up with anything
>> intelligent.
>> > I have heard about this kind of tape form Nitto-Denko but I am
>> wondering
>> if
>> > you are aware of a more easily sourced tape.
>> >
>> > Thanks
>> > Shree
>> >
>> >
>> >
>> > On Fri, Dec 7, 2012 at 1:38 AM, basar bolukbas <
>> basarbolukbas@hotmail.com>wrote:
>> >
>> > >
>> > > Dear Shree
>> > >
>> > > You can also try thermal band. It has got two similar side with a
>> adhesion
>> > > future. First you put it on your carrier. Then you remove protective
>> > > coating on front side, so now you can put/stick your wafer on it. It
>> has
>> > > got very good thermal conductivity. As it will be smaller than your
>> wafer,
>> > > it will not react with your plasma, and you will not have a
>> micromasking or
>> > > contamination problem. After your etching process, put your carrier
>> with
>> > > your wafer on a hotplate @ 80C for a minute. Than you can easily
>> remove
>> > > your wafer from carrier. No residues no cleaning problems. :)
>> > >
>> > > Regards.
>> > >
>> > > > From: snsnair@vt.edu
>> > > > Date: Wed, 5 Dec 2012 10:36:21 -0500
>> > > > To: mems-talk@memsnet.org
>> > > > Subject: [mems-talk] Adhesive to bond onto a carrier wafer for
>> etching
>> > > >
>> > > > Hello all,
>> > > >
>> > > > I need to mount a 4" silicon wafer on a 6" metallized carrier
>> wafer,
>> in
>> > > > order to etch it in a Alcatel deep-reactive ion etcher. I am
>> wondering if
>> > > > someone has used thermal vacuum grease for this purpose that can
>> be
>> > > removed
>> > > > easily at the end. The silicon wafer is patterned with photoresist
>> and
>> > > has
>> > > > no other material on it.
>> > > >
>> > > > Thanks
>> > > > Shree
>> > > > _______________________________________________
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>> _______________________________________________
>> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
>> provider of MEMS and Nanotechnology design and fabrication services.
>> Visit us at http://www.mems-exchange.org
>>
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>
>


David Roberts (Principal)
Silicon Valley Wafer Plating
807 Aldo Ave. Ste. 107 Santa Clara, CA 95054
(408) 469-3203
www.waferplating.com

_______________________________________________
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provider of MEMS and Nanotechnology design and fabrication services.
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