durusmail: mems-talk: Double layer SU-8 fabrication problem
Double layer SU-8 fabrication problem
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Double layer SU-8 fabrication problem
Bill Moffat
2013-01-16
This sounds similar to a problem with WLP and double layers of Polyimide.  They
cure with a vacuum/hot Nitrogen balance to reduce the boiling point of the
solvent helps to remove the solvent completely and remove any wrinkles.  Bill
Moffat
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