One possibility could be due to underexposure. The darkened edges could be
due to the sidewall slope, which is more pronounced at lower doses, and may
appear dark due to the light reflecting off the normal. At higher dose the
sidewall angles should start to straighten out.



On Wed, Jan 16, 2013 at 10:11 PM, Jocelyn Ng  wrote:

> Hello,
>
> I'm doing single layer SU8 2005, thickness ~6-7um. I use 60mJ/cm^-2 on
> sputtered gold surface. But somehow sometimes I notice that the edges of my
> pattern darkens, I suspect it's due to overexposed. But 60mJ is quite a low
> dose compared to the recommended one. I would appreciate any comments
> given. Thank you.
>
> Best Regards,
> Jocelyn
>
> Sent from my iPhone
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