Deep UV or heating of the wafer may also cause the problem. When does the
darkening occur? (Is it immediately visible after exposure or at some other
point in the process)? Do your structures look overexposed after
development?


On 17 January 2013 11:11, Jocelyn Ng  wrote:

> Hello,
>
> I'm doing single layer SU8 2005, thickness ~6-7um. I use 60mJ/cm^-2 on
> sputtered gold surface. But somehow sometimes I notice that the edges of my
> pattern darkens, I suspect it's due to overexposed. But 60mJ is quite a low
> dose compared to the recommended one. I would appreciate any comments
> given. Thank you.
>
> Best Regards,
> Jocelyn
>
> Sent from my iPhone
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