Yuan, For ballpark estimating, you can assume $10k per mask level as a general rule of thumb for Development. The true number varies depending on: 1. Depth of etch 2. Thickness and composition of evaporated material 3. Type of Polyimide 4. Time of release 5. Wafer type 6. Lot size 7. Feature size 8. Type and thickness of metal 9. Lot size 10. Individual fab capability and presence of standard processes for the steps you need. Hope this helps. ------------------------------------- Buzz Busbee Hardy Business Development Manager MEMSCAP Inc. 3021 E. Cornwallis Rd (PHYSICAL ADDRESS) PO Box 14486 (MAIL) Durham, NC 27709 T-919-248-1486 M-919-641-3084 F-919-248-4110 http://www.memscapinc.com http://www.memscap.com _______________________________________ From: mems-talk-bounces+buzz.hardy=memscapinc.com@memsnet.org on behalf of Yuan Jia Sent: Wednesday, March 20, 2013 1:40 PM To: mems-talk@memsnet.org Subject: [mems-talk] MEMS device foundry price estimate Dear all, Hi, I want to do a cost analysis of my MEMS device using a foundry service. Since I fairly new to this field, I am not familiar with the how much it would charge for some processes. So I am wondering if anyone can give me a price estimate on the following processes (per 4 inch wafer, or any other charging standard)? 1. Back side anisotropic etching 2. Thermal evaporation 3. Photolithography 4. Polyimide substrate deposition and pattern 5. XeF2 release Thanks very much Best Regards Yuan Jia _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk