Hi Tian,

I use this protocol:

 - Clean the silicon master during 15 minutes in Piranha (Can I do the same
with Plasma Cleaner? Is the same?I have a very simple Plasma with maximum
20W. )
- Put the master in a desiccator with 100microliters of
Trichloro(1H,1H,2H,2H-perfluorooctyl)silane during 1 hour with simple
vaccum .

Is it process enough to have a monolayer? Or do you think I need to
spincoating de fluorosilane?

Thanks for your help.
Best regards,




2013/3/24 Tang Tian 

> Hi,****
>
> ** **
>
> The anti-stiction layer (ASL) is typically a monolayer of fluorosilane,
> either by spincoating or vapor deposition onto master stamp’s surface.  **
> **
>
> ** **
>
> Best Regards,****
>
> Tian Tang****
>
>  ****
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