Switch from SU-8 to KMPR (also from Microchem). SU-8 isn't meant to be easily removable, whereas KMPR is specifically designed for robustness during electroplating followed by a relatively easy removal. - Kevin On Mon, Mar 18, 2013 at 9:33 PM, Jocelyn Ngwrote: > Dear all, > > I'm using SU-8 2005. > I soft bake at 65C_540S, exposure dose is 60mJ and post exposure bake at > 95C-120S. > > Recently I encounter a problem where, after undergone gold plating process, > photoresist residue remains. > My stripping(remover PG) process is at 65C for an hour followed by acetone > bath in ultrasonic. > My plating temperature is about 45C for 25minutes. > > I tried to strip in remover PG for another 30minutes but nothing seemed to > be working. > I had tried using the same condition previously and did not encounter this > problem. > > I need some advice or comments on this. > Thanks a lot in advance. > > Best Regards, > Jocelyn > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk