Hi, We have a recipe for etching Niobium, which also etches Ti. We have an Oxford Plasma Lab, params are 20 sccm SF6, 10 sccm Ar, pressure is 22 microbar, RF power is 100 W. Since I etching Ti films of 10-15 nm, the etch rates varied, I guess the Ti oxides and also reacts with the substrate (Low temp PECVD), but where roughly between .3 and .9 nm/s. As far as I know, this etches Al2O3 very, very slowly ( we etch Nb on Sapphire, which is even more resistant). Furthermore, SF6 does'nt attack aluminium, I've seen it used to release Al structures (Konrad Lehnerts group at NIST in Boulder do this, If I remember correctly, there is a paper describing their process), so I guess you will get a little bit of physical etching from the argon, but will otherwise be fine. Best, Gabriel ************************************************************** Dr. Gabriel Puebla-Hellmann ETH Zuerich Laboratory for Solid State Physics Quantum Device Lab HPF D5 Schafmattstr. 16 8093 Zurich Switzerland Tel: +41 44 633 71 24 www.qudev.ethz.ch ************************************************************** -----Original Message----- From: mems-talk-bounces+gabriepu=phys.ethz.ch@memsnet.org [mailto:mems-talk-bounces+gabriepu=phys.ethz.ch@memsnet.org] On Behalf Of Xiaoning Wang Sent: Wednesday, April 17, 2013 5:49 PM To: mems-talk@memsnet.org Subject: [mems-talk] Recipe for etching Ti using RIE Hello MEMS, I'm trying to use aluminum oxide as etching mask to etch titanium underneath using RIE. The gases available are Cl2, CF4, CHF3, SF6, CBrF3, CH4, He, H2, Ar, O2, and N2. The Al2O3 layer is ~400nm thick and has ~80nm holes, and Ti layer is ~150nm. I don't care if the Al2O3 will be all etched, but I do want to transfer the pattern to Ti. Is that possible using RIE? What recipe should I use? I imagine should be something with high RF power and low chamber pressure. But since we only have Cl2 gas for chlorine based etching, does anyone know what gases and flow rates should I use? Any advice is greatly appreciated! Thank you so much! Best regards, -- Xiaoning Wang (Travis) PhD Candidate Mechanical Engineering Boston University _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk