Hi Nahid


Can you please let me know what recipe you are using for silicon nitride. I
have worked on the same fab process PECVD nitride as dielectric layer on
gold. May be I will be able to help you.


Kind Regards

Hamood

----------------------------------------

From: "nahid vahabi" 

Sent: Tuesday, April 30, 2013 6:37 AM

To: "mems-talk@memsnet.org" 

Subject: [mems-talk] Silicon Nitride shorting metal layers


Hello all,

I deposit a 250 nm PECVD SiN layer as the dielectric between two gold
layers and the metal layers seem to be short through the nitride each time.
I increased the nitride thickness to 400 nm and still the same. I gathered
that PECVD nitride is quite notorious for the pinholes so I multi-layered
the nitride (6 times of 40 nm each) to get rid of pinholes. It worked only
on 1 wafer and then the same problem again. So I appreciate any comments on
this and whether you think changing the dielectric is a good option.


Thank you,

Nahid

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