Dear all,

I am working with Gersteltec’s GM1050 and GM1070. However, I found that the
process parameters suggested by the manual is not consistent, e.g. the exposure
time is similar for 3 – 8 um, prebake time is very long for 15um thick resist
(35min @ 95 degree). Do anyone has tested these parameters? I am frustated when
I am working with the manual. Should I just followed the Microchem manual
instead? Of course the spin coating process with be different, but PEB, softbake
ane exposure should be similar. Thanks.


Regards,

Bill Chow
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