durusmail: mems-talk: Resist thickness for nitride etch
Resist thickness for nitride etch
2013-05-08
Haider, Ahmad M
2013-05-08
Lou Chomas
2013-05-09
Haider, Ahmad M
2013-05-09
Andrew Sarangan
2013-05-09
Andrew Sarangan
2013-05-09
MRC gmail
2013-05-09
Haider, Ahmad M
2013-05-09
Robert Ditizio
Resist thickness for nitride etch
Andrew Sarangan
2013-05-09
Once the nitride film is etched, fluorine will etch the silicon substrate
very fast, so measurements need to account for that.


On Wed, May 8, 2013 at 11:33 PM, Haider, Ahmad M wrote:

> Hi Lou,
>
> What do you mean by "Be careful to account for any etching into the
> substrate if you are using a profilometer to measure the thickness." I use
> the dektak profilometer to measure the thickness in order to verify if the
> RIE plasma etcher was able to remove all exposed silicon nitride.
>
> Thanks,
> Ahmad
>
> ----- Original Message -----
> From: "Lou Chomas" 
> To: "General MEMS discussion" 
> Sent: Wednesday, May 8, 2013 5:09:30 PM
> Subject: Re: [mems-talk] Resist thickness for nitride etch
>
> Ahmad,    That depends a lot on your process.  I would recommend putting
> some resist down with your pattern on a test wafer and etching for some
> amount of time.  Pick something less than your total etch, but not too
> short.  Measure the thickness of the resist before and after and then you
> can calculate whether the thickness will be sufficient.  Be careful to
> account for any etching into the substrate if you are using a profilometer
> to measure the thickness.  If your recipe has a lot of oxygen, the rate
> against the resist will likely be very high.
> -Lou
> > Date: Wed, 8 May 2013 16:29:49 -0400
> > From: ahaider3@gatech.edu
> > To: mems-talk@memsnet.org
> > Subject: [mems-talk] Resist thickness for nitride etch
> >
> > Hi
> >
> > I am trying to do an anisotropic etch of 400 nm nitride layer in a RIE
> machine. A portion of the nitride is protected by a resist layer on top of
> it. Can you tell approximate how much thickness of resist would I need so
> that the resist doesn't get stripped off during the nitride etch?
> >
> > Thanks,
> > Ahmad
> >
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> --
> Ahmad Haider
> PhD Student, School of Mechanical Engineering
> Georgia Institute of Technology, Atlanta
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
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