Hi, I am searching to make 2 - 5 microns diameter holes in SU8 within a 20 - 40 microns thickness range, of course with a chrome mask. Anyone would have a good recipee (exposure seems very important, cycles?, filters?..)? Regards, Antoine _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk