durusmail: mems-talk: Super hydrophobic films in a new PECVD reactor
Super hydrophobic films in a new PECVD reactor
2013-06-07
2013-06-10
2013-06-10
2013-06-19
Super hydrophobic films in a new PECVD reactor
Bob Henderson
2013-06-07
Is there anyone within the MEMS community that is looking for a film
composed of a silicon oxide and fluorocarbon sandwich which produces a
hydrophobicity with a contact angle >150 degrees. In particular would this
type film be useful for micro fluidic channels as a barrier or to increase
flow rates in small openings? Bob Henderson

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