Hello Tong, not sure, I think you might run into the problem that the following layer is dissolving the previous as SU8 2005 has 55% cyclopentanone in it. But please try and let us all know. If it does not work, you may try to use single layer and significantly reduce spin time (<5 s). In the initial step of spin coating, the thinning of the layer is caused by material removed by centrifugal force, so if you stop the process during this step at certain point there is enough solid material on the substrate, which after careful drying will end up in 50 um layer. The challenge there will be to dry it without creating skin effect, wrinkles etc, as the layer is very wet after spin coating. This worked quite well for 20 um layer from 35 cP resist, whether it will work for 50 um layer, needs to be verified. With best regards, Daniel Daniel Figura smartfabgroup Company process consulting data processing fab software Phone: +421 944 45 26 86 E-mail: daniel.figura@smartfabgroup.com, Web: www.smartfabgroup.com Disclaimer notice: The information contained in this message and any attachments is intended only for the personal and confidential use of the designated recipient(s) named above. If you are not the intended recipient of this message you are hereby notified that any review, disseminitation, distribution or copying of this message is strictly prohibited. If you have received this message by error, please notify the sender immediately. -----Original Message----- From: mems-talk-bounces+daniel.figura=smartfabgroup.com@memsnet.org [mailto:mems-talk-bounces+daniel.figura=smartfabgroup.com@memsnet.org] On Behalf Of Tong CHEN Sent: Friday, June 28, 2013 16:06 To: mems-talk@memsnet.org Subject: [mems-talk] SU8 2005 thickness Hello everyone, I want to make 50um thickness of su8 layer with SU8 2005 because that's the only type we have now, is it possible to do it like make multiple layers? Thanks -- Tong Chen Postdoc SyntheCell Team IGDR CNRS UMR 6290 2, Avenue du Professeur Léon Bernard 35043 Rennes France _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk