Hello Tong Chen,



yes, it works. But due to the increased labour input it is mostly cheaper to
use the resist formulation made for the desired thickness.



Best regards/

Mit freundlichem Gruß



André Bödecker



Institut für Mikrosensoren, -aktoren und -systeme

Universität Bremen Fachbereich 1

Otto-Hahn-Allee1

28359 Bremen

Tel: 0421 218 62596



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