Hi Zhang Zhenfeng, The best solution is to engineer the device so that your bond pads are not over the BCB. There is poor ultrasonic energy transfer to such a soft material. We ran into a similar problem with 3um thick layers of polyimide and solved it by opening windows through the polymer to the oxidized wafer below in the region of the bond pads only. Otherwise we used silver epoxy for our electrical connections. Good luck! On Fri, Jul 12, 2013 at 9:32 PM, Zhang Zhenfengwrote: > We have a problem about gold wire Ball bonding process of BCB-Sio2-Gold > pad : > (Bonding machine:Gold Wire Automatic ball bonding 130KHz;Wire diameter > 0.7mil > Pad size 60um ) > > We use BCB layer for our device to lower the capcitator. > The structure of layer is BCB 2um--SiO2 0.5um---Ti/Pt/Au 0.7um. > > But the SiO2 layer is always peeled off from BCB layer when gold wire > bonding even we adjust many parameter.The SiO2 layer is broken at > the gold bump edge when we do pulling test or bonding process. > There are always some bad part even we use the best one set parameter. > And the parameters isn't stable for diffrent wafer. > > Do you have any advise? Thanks. > > Zhang Zhenfeng > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk