Hi,there are numerous silanes that can act as a bonding agent for Polymers to
glass.  The most common one is Amino Propyl Tri Ethoxy Silane, APTES.  It has a
different vapor pressure to HMDS the most common bonding silane for photoresist.
A common process is APTES vapor, Polymer coating then bake up to 450 degrees C
with no problems.  Bill Moffat

-----Original Message-----
From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-
talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of Fahd Ali
Sent: Wednesday, September 18, 2013 2:08 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] adhesion agents

Hi,
I am searching for a silane coupling agent for the bonding of glass and polymer
(FEP films) . For bonding purposes I have to go up to 260°C, are there coupling
agents or adhesives available which can stand this temperature.

kind regards,
-----------------------------------------------
Fahd Ali


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