Hello Ricky, the standard photoresist are not optimized for copper surfaces (except the PCB resists). I would recommend the usage of an adhesion promoter like TI-Prime (microchemicals, Ulm, Germany). The other problem of staining of the copper has its reason in the metal-ion-free TMAH tetramethyl ammonium hydroxide as the main component of your developer. This substance is able to attack slightly the copper under forming a complex. A KOH-based developer would work much better. Best regards/Mit freundlichem Gruß André Bödecker Institut für Mikrosensoren, -aktoren und -systeme Universität Bremen Fachbereich 1 Otto-Hahn-Allee1 28359 Bremen Tel: 0421 218 62596 _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk