durusmail: mems-talk: Thick Permanent Photoresist
Thick Permanent Photoresist
2013-09-23
2013-09-23
2013-09-24
2013-09-27
2013-09-24
Thick Permanent Photoresist
TOPART Patrice
2013-09-23
Have you looked at KMPR?



Patrice Topart, PhD
Gestionnaire de groupe, Microfabrication
Group Manager Microfabrication
INO
2740 Einstein
Québec, Qc, Canada
G1P 4S4
G Tél/Phone: 418-657-7406, 2502
/  Fax: 418-657-7009
  Email: patrice.topart@ino.ca
 WWW: www.ino.ca

-----Message d'origine-----
De : mems-talk-bounces+patrice.topart=ino.ca@memsnet.org [mailto:mems-talk-
bounces+patrice.topart=ino.ca@memsnet.org] De la part de Ricky Anthony
Envoyé : Monday, September 23, 2013 5:02 AM
À : mems-talk@memsnet.org
Objet : [mems-talk] Thick Permanent Photoresist

Hi,

I was wondering if anyone can suggest me thick permanent photoresist (70-100um)
single spin. I know of SU-8 but I need resists which have lower CTE~ (as low as
20ppm/C) or close.

Many Thanks,

Ricky Anthony
Tyndall National Institute
Ireland
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