Hi All, I have SU-8 as permanent photoresist, but need one with lower CTE and thickness as high as 70um or more. KMPR CTE is not known. So, I am looking for other options. TMMR is another resist but has CTE more than SU-8. Many Thanks, Ricky Anthony Microsystems Center Tyndall National Institute University College Cork Cork, IRELAND -----Original Message----- From: Ricky Anthony Sent: 24 September 2013 09:26 To: 'General MEMS discussion'; mems-talk@memsnet.org Subject: RE: Thick Permanent Photoresist Hi, Thanks for your reply. I have looked into KMPR. But I am not sure of its CTE. I asked the company, but was told that since it is developed for molding purposes, CTE of KMPR was ignored. So, I was wondering if there is thick resist, with low CTE. Or any Polyimides which can give me a thickness of (70-100um, highly unlikely). Many Thanks, Ricky -----Original Message----- From: mems-talk-bounces+ricky.anthony=tyndall.ie@memsnet.org [mailto:mems-talk- bounces+ricky.anthony=tyndall.ie@memsnet.org] On Behalf Of TOPART Patrice Sent: 23 September 2013 18:42 To: 'General MEMS discussion' Subject: Re: [mems-talk] Thick Permanent Photoresist Have you looked at KMPR? Patrice Topart, PhD Gestionnaire de groupe, Microfabrication Group Manager Microfabrication INO 2740 Einstein Québec, Qc, Canada G1P 4S4 G Tél/Phone: 418-657-7406, 2502 / Fax: 418-657-7009 Email: patrice.topart@ino.ca : WWW: www.ino.ca -----Message d'origine----- De : mems-talk-bounces+patrice.topart=ino.ca@memsnet.org [mailto:mems-talk- bounces+patrice.topart=ino.ca@memsnet.org] De la part de Ricky Anthony Envoyé : Monday, September 23, 2013 5:02 AM À : mems-talk@memsnet.org Objet : [mems-talk] Thick Permanent Photoresist Hi, I was wondering if anyone can suggest me thick permanent photoresist (70-100um) single spin. I know of SU-8 but I need resists which have lower CTE~ (as low as 20ppm/C) or close. Many Thanks, Ricky Anthony Tyndall National Institute Ireland _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk ******************************************************************************** ** Ce courrier lectronique s'adresse uniquement la personne d sign e ci-dessus, il est confidentiel et ne doit pas tre remis une autre personne, ni reproduit et son contenu ne peut tre autrement divulgu . Si ce courrier lectronique vous est transmis par erreur, veuillez nous en avertir imm diatement l'adresse securite@ino.ca. Nous vous remercions de votre collaboration. This email is directed in confidence solely to the person named above, and may not otherwise be distributed, copied or disclosed. If you have received this email by error, please notify us immediately by email to address security@ino.ca. Thank you for your cooperation. ******************************************************************************** ** _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk